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＜Books＞
Film deposition by plasma techniques / Mitsuharu Konuma
(Springer series on atoms + plasmas ; 10)
| Material Type | Books |
|---|---|
| Publisher | Berlin ; Tokyo : Springer-Verlag |
| Classification | LCC:TK7871.15.F5 DC20:621.381/52 |
| Year | c1992 |
| Size | ix , 224 p. : ill. ; 24 cm |
| URL |
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| Location | Volume | Call No. | Barcode No. | Status | Comments | Reserve |
|---|---|---|---|---|---|---|
| 3F |
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429A||Ato||10 | 10188605 |
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| Other titles | other title:プラズマと成膜の基礎 |
|---|---|
| Notes | Based on: Purazuma to seimaku no kiso / Mitsuharu Konuma. Cf. Pref Includes bibliographical references and index |
| Authors | *小沼, 光晴 (1950-) <コヌマ, ミツハル> |
| Subjects | LCSH:Thin films LCSH:Plasma-enhanced chemical vapor deposition |
| ID | 1000017039 |
| NCID | BA14397573 |