<Books>
Electron and ion optics / Miklos Szilagyi
(Microdevices : physics and fabrication technologies)
Material Type | Books |
---|---|
Publisher | New York : Plenum Press |
Classification | LCC:QC793.5.E62 DC19:537.5/6 |
Year | c1988 |
Size | xvi, 539 p. : ill. ; 26 cm |
Hide book details.
Hide details.
Notes | Includes index Bibliography: p. 515-528 |
---|---|
Authors | *Szilágyi, Miklós |
Subjects | LCSH:Electron optics LCSH:Electron beams LCSH:Ion bombardment LCSH:Electromagnetic lenses |
ID | 1000015996 |
NCID | BA03946294 |