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＜Books＞
Ion implantation, sputtering and their applications / by P. D. Townsend, J. C. Kelly, N. E. W. Hartley
| Material Type | Books |
|---|---|
| Publisher | London ; New York : Academic Press |
| Classification | LCC:QC702.7.I55 DC:530.4/1 |
| Year | 1976 |
| Size | ix, 333 p. : ill. ; 24 cm |
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| Notes | Includes bibliographies and index |
|---|---|
| Authors | *Townsend, Peter David Kelly, J. C. (John Clive) joint author Hartley, W. N. joint author |
| Subjects | LCSH:Ion implantation LCSH:Sputtering (Physics) |
| ID | 1000014694 |
| NCID | BA07511624 |