<Books>
Ion implantation, sputtering and their applications / by P. D. Townsend, J. C. Kelly, N. E. W. Hartley
Material Type | Books |
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Publisher | London ; New York : Academic Press |
Classification | LCC:QC702.7.I55 DC:530.4/1 |
Year | 1976 |
Size | ix, 333 p. : ill. ; 24 cm |
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Notes | Includes bibliographies and index |
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Authors | *Townsend, Peter David Kelly, J. C. (John Clive) joint author Hartley, W. N. joint author |
Subjects | LCSH:Ion implantation LCSH:Sputtering (Physics) |
ID | 1000014694 |
NCID | BA07511624 |