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＜図書＞
Ion implantation, sputtering and their applications / by P. D. Townsend, J. C. Kelly, N. E. W. Hartley
| データ種別 | 図書 |
|---|---|
| 出版者 | London ; New York : Academic Press |
| 分 類 | LCC:QC702.7.I55 DC:530.4/1 |
| 出版年 | 1976 |
| 大きさ | ix, 333 p. : ill. ; 24 cm |
書誌詳細を非表示
| 一般注記 | Includes bibliographies and index |
|---|---|
| 著者標目 | *Townsend, Peter David Kelly, J. C. (John Clive) joint author Hartley, W. N. joint author |
| 件 名 | LCSH:Ion implantation LCSH:Sputtering (Physics) |
| 書誌ID | 1000014694 |
| NCID | BA07511624 |