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Plasma synthesis and etching of electronic materials : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A. / editors, R.P.H. Chang, B. Abeles
(Materials Research Society symposia proceedings ; v. 38)
| Material Type | Books |
|---|---|
| Publisher | Pittsburgh, Pa. : Materials Research Society |
| Classification | LCC:TA2005 DC19:621.044 |
| Year | c1985 |
| Size | xv, 522 p. : ill. ; 24 cm |
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| Location | Volume | Call No. | Barcode No. | Status | Comments | Reserve |
|---|---|---|---|---|---|---|
| 3F |
|
426E||Pc-Pla||1984 | 10046266 |
|
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| Notes | Papers presented at the Symposium on Plasma Synthesis and Etching of Electronic Materials held in Boston, Mass. on Nov. 27-30, 1984 Includes bibliographies and indexes |
|---|---|
| Authors | Chang, R. P. H. (Robert Pang Heng), 1941- Abeles, B. Symposium on Plasma Synthesis and Etching of Electronic Materials (1984 : Boston, Mass.) Materials Research Society |
| Subjects | LCSH:Plasma engineering -- Congresses
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LCSH:Plasma etching -- Congresses All Subject Search LCSH:Electronics -- Materials -- Congresses All Subject Search |
| ID | 1000014027 |
| NCID | BA03290705 |