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Plasma-surface interactions and processing of materials / edited by Orland Auciello ... [et al.]
(NATO ASI series ; ser. E . Applied sciences ; no. 176)
| Material Type | Books |
|---|---|
| Publisher | Dordrecht ; Boston : Kluwer Academic Publishers |
| Classification | LCC:TA418.7 DC20:620/.44 |
| Year | c1990 |
| Size | xiii, 557 p. : ill. ; 25 cm |
| URL |
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| Location | Volume | Call No. | Barcode No. | Status | Comments | Reserve |
|---|---|---|---|---|---|---|
| 3F |
|
426AB||Pc-Pla||1988 | 10005213 |
|
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| Notes | "Proceedings of the NATO Advanced Study Institute on Plasma-Surface Interactions and Processing of Materials, Alicante, Spain, September 4-16, 1988"--T.p. verso |
|---|---|
| Authors | *NATO Advanced Study Institute on Plasma-Surface Interactions and Processing of Materials (1988 : Alicante, Spain) Auciello, Orlando, 1945- |
| Subjects | LCSH:Materials -- Surfaces -- Congresses
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LCSH:Materials -- Effect of radiation on -- Congresses All Subject Search LCSH:Microelectronics -- Materials -- Effect of radiation on -- Congresses All Subject Search LCSH:Plasma etching -- Congresses All Subject Search |
| ID | 1000011788 |
| NCID | BA10180092 |