<Books>
Plasma-surface interactions and processing of materials / edited by Orland Auciello ... [et al.]
(NATO ASI series ; ser. E . Applied sciences ; no. 176)
Material Type | Books |
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Publisher | Dordrecht ; Boston : Kluwer Academic Publishers |
Classification | LCC:TA418.7 DC20:620/.44 |
Year | c1990 |
Size | xiii, 557 p. : ill. ; 25 cm |
URL |
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Location | Volume | Call No. | Barcode No. | Status | Comments | Reserve |
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3F |
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426AB||Pc-Pla||1988 | 10005213 |
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Notes | "Proceedings of the NATO Advanced Study Institute on Plasma-Surface Interactions and Processing of Materials, Alicante, Spain, September 4-16, 1988"--T.p. verso |
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Authors | *NATO Advanced Study Institute on Plasma-Surface Interactions and Processing of Materials (1988 : Alicante, Spain) Auciello, Orlando, 1945- |
Subjects | LCSH:Materials -- Surfaces -- Congresses
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LCSH:Materials -- Effect of radiation on -- Congresses All Subject Search LCSH:Microelectronics -- Materials -- Effect of radiation on -- Congresses All Subject Search LCSH:Plasma etching -- Congresses All Subject Search |
ID | 1000011788 |
NCID | BA10180092 |