<Books>
Plasma etching : an introduction / edited by Dennis M. Manos, Daniel L. Flamm
(Plasma-materials interactions)
Material Type | Books |
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Publisher | Boston ; Tokyo : Academic Press |
Classification | LCC:TA2020 DC19:621.044 NDC8:427.6 |
Year | c1989 |
Size | xii, 476 p. : ill. ; 24 cm |
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Notes | Includes bibliographical references and index |
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Authors | Manos, Dennis M. Flamm, Daniel L. |
Subjects | LCSH:Plasma etching |
ID | 1000011338 |
NCID | BA07363130 |