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＜Books＞
Applications of plasma processes to VLSI technology / edited by Takuo Sugano ; translated by Hyo-gun Kim
| Material Type | Books |
|---|---|
| Publisher | New York : Wiley |
| Classification | LCC:TK7871.85 DC19:621.381/73 |
| Year | c1985 |
| Size | xiv, 394 p. : ill. ; 24 cm |
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| Other titles | original title:Handōtai purazuma purosesu gijutsu |
|---|---|
| Notes | Translation of: Handōtai purazuma purosesu gijutsu "A Wiley-Interscience publication." Bibliography: p. 369-389 Includes index |
| Authors | 菅野, 卓雄(1931-) <スガノ, タクオ> |
| Subjects | LCSH:Semiconductors -- Etching
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LCSH:Integrated circuits -- Very large scale integration -- Design and construction All Subject Search LCSH:Plasma etching LCSH:Vapor-plating |
| ID | 1000011234 |
| NCID | BA0724373X |