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＜Books＞
Beam processing technologies / edited by Norman G. Einspruch, S.S. Cohen, Raj N. Singh
(VLSI electronics : microstructure science / edited by Norman G. Einspruch ; v. 21)
| Material Type | Books |
|---|---|
| Publisher | San Diego, Calif. ; Tokyo : Academic Press |
| Classification | LCC:TK7874 NDC7:549.3 NDC7:549.46 NDC8:549.708 |
| Year | c1989 |
| Size | xii, 546 p. : ill. ; 24 cm |
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| Notes | Includes bibliographies and index |
|---|---|
| Authors | Einspruch, Norman G. Cohen, Simon S. Singh, Raj N. |
| Subjects | LCSH:Intergrated circuits -- Very large scale integration All Subject Search |
| ID | 1000011111 |
| NCID | BA06985587 |