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Proceedings of the Seventh Symposium on Plasma Processing / edited by G.S. Mathad, G.C. Schwartz, D.W. Hess
(Proceedings / [Electrochemical Society] ; v. 88-22)

Material Type Books
Publisher Pennington, N.J. : Electrochemical Society
Year c1988
Size viii, 400 p. : ill. ; 23 cm

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3F
426E||Pc-Pla||1988 10046290

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Other titles spine title:Plasma processing
Authors Symposium on Plasma Processing (7th : 1988 : Atlanta, Ga.)
Mathad, G. S.
Schwartz, G. C.
Hess, Dennis W.
ID 1000011039
NCID BA06909148