<Books>
Electron-beam technology in microelectronic fabrication / edited by George R. Brewer ; contributors, J. P. Ballantyne ... [et al.]
Material Type | Books |
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Publisher | New York : Academic Press |
Classification | LCC:TK7874 DC:621.381/7 |
Year | 1980 |
Size | xi, 362 p. : ill. ; 24 cm |
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Notes | Includes bibliographies and index |
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Authors | *Brewer, George Raymond, 1922- Ballantyne, J. P. |
Subjects | LCSH:Microelectronics LCSH:Lithography, Electron beam |
ID | 1000010590 |
NCID | BA03079113 |