Export Mendeley
＜Books＞
Electron-beam technology in microelectronic fabrication / edited by George R. Brewer ; contributors, J. P. Ballantyne ... [et al.]
| Material Type | Books |
|---|---|
| Publisher | New York : Academic Press |
| Classification | LCC:TK7874 DC:621.381/7 |
| Year | 1980 |
| Size | xi, 362 p. : ill. ; 24 cm |
Hide book details.
Hide details.
| Notes | Includes bibliographies and index |
|---|---|
| Authors | *Brewer, George Raymond, 1922- Ballantyne, J. P. |
| Subjects | LCSH:Microelectronics LCSH:Lithography, Electron beam |
| ID | 1000010590 |
| NCID | BA03079113 |