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Sputtering of alloys and compounds, electron and neutron sputtering, surface topography / edited by R. Behrisch ; with contributions by R. Behrisch ... [et al.]
(Topics in applied physics ; v. 52 . Sputtering by particle bombardment / edited by R. Behrisch ; 2)

Material Type Books
Publisher Berlin ; Tokyo : Springer-Verlag
Classification LCC:QC176.8.S72
DC19:530.4/1
Year 1983
Size xii, 391 p. : ill. ; 24 cm
URL

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3F
426F||Beh||2 10046514

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Notes Includes bibliographical references and indexes
Authors Behrisch, Rainer
Subjects LCSH:Sputtering (Physics)
LCSH:Solids -- Effect of radiation on  All Subject Search
LCSH:Surfaces (Physics) -- Effect of radiation on  All Subject Search
ID 1000010412
NCID BA00899846

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