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Sputtering of alloys and compounds, electron and neutron sputtering, surface topography / edited by R. Behrisch ; with contributions by R. Behrisch ... [et al.]
(Topics in applied physics ; v. 52 . Sputtering by particle bombardment / edited by R. Behrisch ; 2)
Material Type | Books |
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Publisher | Berlin ; Tokyo : Springer-Verlag |
Classification | LCC:QC176.8.S72 DC19:530.4/1 |
Year | 1983 |
Size | xii, 391 p. : ill. ; 24 cm |
URL |
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Location | Volume | Call No. | Barcode No. | Status | Comments | Reserve |
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3F |
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426F||Beh||2 | 10046514 |
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Notes | Includes bibliographical references and indexes |
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Authors | Behrisch, Rainer |
Subjects | LCSH:Sputtering (Physics) LCSH:Solids -- Effect of radiation on All Subject Search LCSH:Surfaces (Physics) -- Effect of radiation on All Subject Search |
ID | 1000010412 |
NCID | BA00899846 |