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＜図書＞
Sputtering of alloys and compounds, electron and neutron sputtering, surface topography / edited by R. Behrisch ; with contributions by R. Behrisch ... [et al.]
(Topics in applied physics ; v. 52 . Sputtering by particle bombardment / edited by R. Behrisch ; 2)

データ種別	図書
出版者	Berlin ; Tokyo : Springer-Verlag
分　類	LCC:QC176.8.S72 DC19:530.4/1
出版年	1983
大きさ	xii, 391 p. : ill. ; 24 cm
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