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Plasma processing : symposium held April 15-18, 1986, Palo Alto, California, U.S.A. / editors, J.W. Coburn, R.A. Gottscho, D.W. Hess
(Materials Research Society symposium proceedings ; v. 68)
| Material Type | Books |
|---|---|
| Publisher | Pittsburgh, Pa. : Materials Research Society |
| Classification | LCC:TA2005 DC19:621.044 |
| Year | c1986 |
| Size | xvii, 463 p. : ill. ; 24 cm |
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| Location | Volume | Call No. | Barcode No. | Status | Comments | Reserve |
|---|---|---|---|---|---|---|
| 3F |
|
426E||Pc-Pla||l986 | 10046274 |
|
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| Notes | Includes indexes |
|---|---|
| Authors | Coburn, J. W., 1932- Gottscho, R. A. Hess, Dennis W. Materials Research Society Symposium on Plasma Processing (1986 : Palo Alto, Calif.) |
| Subjects | LCSH:Plasma engineering -- Congresses All Subject Search |
| ID | 1000010363 |
| NCID | BA00570669 |