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＜Books＞
Dry etching for microelectronics / edited by Ronald A. Powell
(Materials processing, theory and practices ; v. 4)
| Material Type | Books |
|---|---|
| Publisher | Amsterdam ; Tokyo : North-Holland |
| Publisher | New York, N.Y. : Distributors for the USA and Canada, Elsevier Science Pub. Co. |
| Classification | LCC:TK7871.85 DC:621.381/73 |
| Year | 1984 |
| Size | xi, 299 p. : ill. ; 24 cm |
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| Notes | Bibliography: p. 223-294 Includes index |
|---|---|
| Authors | Powell, Ronald A. |
| Subjects | LCSH:Semiconductors -- Etching
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LCSH:Plasma etching |
| ID | 1000010319 |
| NCID | BA00157673 |