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＜Books＞
Plasma etching in semiconductor fabrication / Russ A. Morgan
(Plasma technology ; 1)
| Material Type | Books |
|---|---|
| Publisher | Amsterdam ; Tokyo : Elsevier |
| Classification | LCC:TK7871.85 DC19:621.3815/2 |
| Year | c1985 |
| Size | 318 p : ill. ; 25 cm |
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| Location | Volume | Call No. | Barcode No. | Status | Comments | Reserve |
|---|---|---|---|---|---|---|
| 3F |
|
426E||Pla||1 | 10045979 |
|
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| Notes | Includes bibliographical references and index |
|---|---|
| Authors | *Morgan, Russ A., 1950- |
| Subjects | LCSH:Semiconductors -- Etching
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LCSH:Plasma etching |
| ID | 1000010291 |
| NCID | BA00003964 |