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RT Book, Whole SR Print DC OPAC T1 Low pressure plasmas and microstructuring technology / Gerhard Franz A1 Franz, Gerhard YR 2009 FD c2009 SP xxiv, 732 p. K1 Plasma (Ionized gases) -- Industrial applications K1 Plasma engineering K1 Plasma etching PB Springer PP Berlin SN 9783540858485 LA English (英語) CL DC22:621.044 NO Includes bibliographical references and index NO 書誌ID=1000074969; NCID=BA9169860X; LK [OPAC]https://libop-nifs.nifs.ac.jp/opac/opac_link/bibid/1000074969 LK [Webcat Plus]http://webcatplus-equal.nii.ac.jp/libportal/DocDetail?hdn_if_lang=jpn&txt_docid=NCID:BA9169860X; [Webcat Plus]http://webcatplus-equal.nii.ac.jp/libportal/EqualFromForm?txt_isbn=9783540858485 OL 30